Nitrogen uv curing system machine

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Nitrogen uv curing system machine 2026-08-19 15:53:29

The wafer nitrogen uvled curing system is an automated equipment that uses UVLED ultraviolet light source and nitrogen protection technology to debond the UV photosensitive tape (UV film/blue film) used after wafer slicing.

1) After the wafer slicing is completed, the UV adhesive film that fixes the wafer loses its stickiness·

2) Realize non-destructive separation of chips and adhesive films, facilitating subsequent picking and packaging,

3) Replace traditional hot air/chemical solvent debonding methods to avoid thermal damage and pollution

The Core Advantages of Nitrogen UV Curing System

Advantage	Instructions
Cold light source without thermal damage	UVLED light source has no infrared radiation, and the surface temperature rise of the substrate does not exceed 5 ℃, making it suitable for thermal sensitive materials
High Efficiency and Energy Saving	The energy consumption is about 1/10 of traditional UV mercury lamps, and the service life exceeds 20000 hours (mercury lamps only have about 800 hours)
Environmental Safety	Does not contain mercury, does not produce ozone, and meets environmental requirements
Accurate and controllable	Adjustable irradiation time, light intensity, and nitrogen pressure to meet different process requirements
Large area uniform irradiation	Supports 6-inch, 8-inch, and 12 inch large-sized wafers with a light uniformity of ≥ 90%
High degree of automation	Supports multi-channel working modes and can be integrated into automated production lines

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